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Campbell 1996 Oxford University Press edition in English.

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Ideal for upper-level undergraduate or first-year graduate courses and as a handy reference for professionals The Science and Engineering of Microelectronic Fabrication Second Edition provides a thorough and accessible introduction to the field of microfabrication.


Publication date 1996.

 9780195136050 By Cram101 Textbook Reviews 2011.

Introduction to Microelectronic Fabrication 2001 2nd ed S. CampbellOxford University Press1996536 ppISBN 0-19-510508-73500 Hardcover Keywords. 27The Science and Engineering of Microelectronic Fabrication Oxford University Press 2001. PDF Studyguide for The Science and Engineering of Microelectronic Fabrication by Campbell ISBN. In microelectronic fabrication metals are used as electrically conducting materials for interconnects. Silicon Processing for the VLSI Era Vol 1.


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